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- journal of vacuum science & technology: part b-microelectronics & nanometer structures11
- applied physics letters9
- ieee/cpmt/semi. 28th international electronics manufacturing technology symposium (cat. no.03ch37479)7
- journal of applied physics7
- journal of micromechanics & microengineering7
- journal of micromechanics and microengineering7
- journal of vacuum science & technology b: microelectronics and nanometer structures7
- journal of the electrochemical society3
- technical digest of the 17th international vacuum nanoelectronics conference (ieee cat. no.04th8737)3