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- spie proceedings4
- sensors and actuators a: physical3
- 2011 16th international solid-state sensors, actuators and microsystems conference1
- 2015 28th ieee international conference on micro electro mechanical systems (mems)1
- ieee electron device letters1
- journal of microelectromechanical systems1
- journal of micromechanics and microengineering1
- journal of vacuum science & technology a: vacuum, surfaces, and films1
- microelectromechanical systems1