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Reliability study of 10/100 nm Ti/Pt microheaters

Authors :
Dekkers, Max H.J.
Dekkers, Max H.J.
Publication Year :
2024

Details

Database :
OAIster
Notes :
Dekkers, Max H.J.
Publication Type :
Electronic Resource
Accession number :
edsoai.on1456723229
Document Type :
Electronic Resource