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Plasma-assisted ALD of IrO2 for Neuroelectronic Applications
- Authors :
- DI PALMA, V
Pianalto, A
Perego, M
Tallarida, G
Fanciulli, M
Valerio Di Palma
Andrea Pianalto
Michele Perego
Graziella Tallarida
Marco Fanciulli
DI PALMA, V
Pianalto, A
Perego, M
Tallarida, G
Fanciulli, M
Valerio Di Palma
Andrea Pianalto
Michele Perego
Graziella Tallarida
Marco Fanciulli
- Publication Year :
- 2022
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1427428437
- Document Type :
- Electronic Resource