Improved Planar Hall Effect sensors for fluid measurement techniques

Inductive flow measurement techniques such as the Contactless Inductive Flow Tomography require sensors that provide a magnetic field resolution of 1 nT while operating in magnetic fields of several mT. With advancements in state-of-the-art magnetoresistive thin-film sensors the required behavior regarding sensitivity, precision and hysteresis can be achieved [1]. Planar Hall Effect sensor have been shown to be one of the leading sensor types in this area. Therefore we present a detailed study on the effect of different sensor layouts, geometries, magnetic flux concentrators and other parameters on the characteristics of single layer Permalloy Planar Hall Effect sensors. [1] Granell, Pablo Nicolás, et al. npj Flexible Electronics 3.1 (2019): 1-6.