Raw data files for Fig. 9 Auger depth profiles in 'Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam'

Details

Database :

OAIster

Notes :

application/zip, application/pdf, Japanese

Publication Type :

Electronic Resource

Accession number :

edsoai.on1409761638

Document Type :

Electronic Resource