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Analysis of Ultra-Thin HfO2/SiON/Si(001): Comparison of Three Different Techniques
- Authors :
- Kimura, Kenji
Nakajima, Kaoru
Conard, Thierry
Vandervorst, Wilfried
Bergmaier, Andreas
Dollinger, Guenther
Kimura, Kenji
Nakajima, Kaoru
Conard, Thierry
Vandervorst, Wilfried
Bergmaier, Andreas
Dollinger, Guenther
- Publication Year :
- 2010
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1389664064
- Document Type :
- Electronic Resource