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Towards Portable Thermal Vacuum Sensor-Consideration of Electrical Building Blocks and Compact Housing

Authors :
Ranđelović, D.V.
Poljak, Predrag
Sarajlić, Milija
Vorkapić, M.
Frantlović, Miloš
Tanasković, D.
Popović, B.
Ranđelović, D.V.
Poljak, Predrag
Sarajlić, Milija
Vorkapić, M.
Frantlović, Miloš
Tanasković, D.
Popović, B.
Source :
2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings
Publication Year :
2019

Abstract

Multipurpose ICTM thermopile-based MEMS sensors have been successfully demonstrated as gas flow sensor, vacuum sensor, thermal converter and gas type sensor. Apart from further improvement of the sensor's design and performances, one direction of research is working towards realization of portable thermal devices. The aim of this paper is to present preliminary considerations of electrical building blocks and compact housing neccessary to realize a portable thermal vacuum device.

Details

Database :
OAIster
Journal :
2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings
Notes :
2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings
Publication Type :
Electronic Resource
Accession number :
edsoai.on1388611087
Document Type :
Electronic Resource