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Read-out calibration of a SOI capacitive transducer using the pull-in voltage
- Publication Year :
- 2008
-
Abstract
- Electrical Engineering, Mathematics and Computer Science
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1357833670
- Document Type :
- Electronic Resource