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Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement

Authors :
De Graaf, G. (author)
Mol, L. (author)
Rocha, L.A. (author)
Cretu, E. (author)
Wolffenbuttel, R.F. (author)
De Graaf, G. (author)
Mol, L. (author)
Rocha, L.A. (author)
Cretu, E. (author)
Wolffenbuttel, R.F. (author)
Publication Year :
2005

Abstract

Electrical Engineering, Mathematics and Computer Science

Details

Database :
OAIster
Notes :
English
Publication Type :
Electronic Resource
Accession number :
edsoai.on1357811336
Document Type :
Electronic Resource

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