Modeling of high power impulse magnetron sputtering discharges with tungsten target

MLA

Babu, Swetha Suresh, et al. Modeling of High Power Impulse Magnetron Sputtering Discharges with Tungsten Target. 2022. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1349063765&authtype=sso&custid=ns315887.

APA

Babu, S. S., Rudolph, M., Lundin, D., Shimizu, T., Fischer, J., Raadu, M. A., Brenning, N., & Gudmundsson, J. T. (2022). Modeling of high power impulse magnetron sputtering discharges with tungsten target.

Chicago

Babu, Swetha Suresh, Martin Rudolph, Daniel Lundin, Tetsuhide Shimizu, Joel Fischer, Michael A. Raadu, Nils Brenning, and Jon Tomas Gudmundsson. 2022. “Modeling of High Power Impulse Magnetron Sputtering Discharges with Tungsten Target.” http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1349063765&authtype=sso&custid=ns315887.