OZONE GAS SENSORS BASED ON OFF-STOICHIOMETRIC COPPER-CHROMIUM-OXIDE THIN FILMS

Ozone is a major concern for indoor office pollution. Recurring exposure to low levels of ozone (in ppb range) can be associated with several cardiopulmonary diseases. As such, there is a need for cheap, easy-to-integrate ozone gas sensors that can achieve good performance and work as an alarm for dangerous ozone concentrations. In this work, we propose the use of off-stoichiometric copper-chromium-oxide, that has shown great reversible measurements at low temperature for ozone detection, as low as 50 ppb. The selectivity compared with molecular oxygen is shown. Near-Atmospheric Pressure X-Ray Photoelectron Spectroscopy led to the understanding of the ozone - delafossite surface reaction. This work discloses pioneering results in the fabrication of low cost, high sensitivity ozone sensors based on a p-type material.