Characterisation of a PERCIVAL monolithic active pixel prototype using synchrotron radiation

PERCIVAL (""Pixelated Energy Resolving CMOS Imager, Versatile And Large"") is a monolithic active pixel sensor (MAPS) based on CMOS technology. Is being developed by DESY, RAL/STFC, Elettra, DLS, and PAL to address the various requirements of detectors at synchrotron radiation sources and Free Electron Lasers (FELs) in the soft X-ray regime. These requirements include high frame rates and FELs base-rate compatibility, large dynamic range, single-photon counting capability with low probability of false positives, high quantum efficiency (QE), and (multi-)megapixel arrangements with good spatial resolution. Small-scale back-side-illuminated (BSI) prototype systems are undergoing detailed testing with X-rays and optical photons, in preparation of submission of a larger sensor. A first BSI processed prototype was tested in 2014 and a preliminary result—first detection of 350eV photons with some pixel types of PERCIVAL—reported at this meeting a year ago. Subsequent more detailed analysis revealed a very low QE and pointed to contamination as a possible cause. In the past year, BSI-processed chips on two more wafers were tested and their response to soft X-ray evaluated. We report here the improved charge collection efficiency (CCE) of different PERCIVAL pixel types for 400eV soft X-rays together with Airy patterns, response to a flat field, and noise performance for such a newly BSI-processed prototype sensor.