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Quantitative dopant distributions in GaAs nanowires using atom probe tomography

Authors :
Du, S.
Burgess, Timothy
Gault, B.
Gao, Qiang
Bao, Peite
Li, Li
Cui, Xiangyuan
Yeoh, Wai Kong
Liu, Hong-Wei
Yao, Lan
Ceguerra, A.V.
Jagadish, Chennupati
Ringer, Simon P.
Zheng, Rongkun
Tan, Hark Hoe
Du, S.
Burgess, Timothy
Gault, B.
Gao, Qiang
Bao, Peite
Li, Li
Cui, Xiangyuan
Yeoh, Wai Kong
Liu, Hong-Wei
Yao, Lan
Ceguerra, A.V.
Jagadish, Chennupati
Ringer, Simon P.
Zheng, Rongkun
Tan, Hark Hoe
Source :
Ultramicroscopy
Publication Year :
2013

Abstract

Controllable doping of semiconductor nanowires is critical to realize their proposed applications, however precise and reliable characterization of dopant distributions remains challenging. In this article, we demonstrate an atomic-resolution three-dimens

Details

Database :
OAIster
Journal :
Ultramicroscopy
Publication Type :
Electronic Resource
Accession number :
edsoai.on1291802244
Document Type :
Electronic Resource