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Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films
- Publication Year :
- 2004
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1235122731
- Document Type :
- Electronic Resource
- Full Text :
- https://doi.org/10.1109.TUFFC.2004.1350963