Metal organic chemical vapor deposition of ultrathin ZrO2 films on Si(100) and Si(111) studied by electron spectroscopy

MLA

Karlsson, Patrik G., et al. Metal Organic Chemical Vapor Deposition of Ultrathin ZrO2 Films on Si(100) and Si(111) Studied by Electron Spectroscopy. 2007. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1235122148&authtype=sso&custid=ns315887.

APA

Karlsson, P. G., Richter, J. H., Blomquist, J., Uvdal, P., Grehk, T. M., & Sandell, A. (2007). Metal organic chemical vapor deposition of ultrathin ZrO2 films on Si(100) and Si(111) studied by electron spectroscopy.

Chicago

Karlsson, Patrik G., Jan Hinnerk Richter, J. Blomquist, P. Uvdal, T. M. Grehk, and Anders Sandell. 2007. “Metal Organic Chemical Vapor Deposition of Ultrathin ZrO2 Films on Si(100) and Si(111) Studied by Electron Spectroscopy.” http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1235122148&authtype=sso&custid=ns315887.