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NanoRIM : Sub-micron Structuring with Reaction Injection Molding
- Publication Year :
- 2017
-
Abstract
- We report “nanoRIM”, the first reaction injection molding (RIM) replication method for thermosets with demonstrated feature sizes down to 250 nm. NanoRIM constitutes the first scalable manufacturing method for thermoset polymers that allows combining large (> cm) and small (< μm) lateral feature sizes with varying replica thickness in the same device. We demonstrate nanoRIM for manufacturing replica in off-stoichiometry thiol-ene (OSTE) thermoset.<br />QC 20170123
Details
- Database :
- OAIster
- Notes :
- application/pdf, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1234993644
- Document Type :
- Electronic Resource
- Full Text :
- https://doi.org/10.1109.MEMSYS.2017.7863378