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Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon
- Authors :
- Kukli, K.
Ritala, M.
Uustare, T.
Aarik, J.
Forsgren, Katarina
Sajavaara, T.
Leskelä, M.
Hårsta, Anders
Kukli, K.
Ritala, M.
Uustare, T.
Aarik, J.
Forsgren, Katarina
Sajavaara, T.
Leskelä, M.
Hårsta, Anders
- Publication Year :
- 2002
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1234958919
- Document Type :
- Electronic Resource