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Plasma Dynamics in an Unipolar Pulsed Magnetron Sputtering Discharge
- Authors :
- Gudmundsson, J. T.
Alami, J.
Gylfason, Kristinn B.
Bohlmark, J.
Helmersson, U.
Gudmundsson, J. T.
Alami, J.
Gylfason, Kristinn B.
Bohlmark, J.
Helmersson, U.
- Publication Year :
- 2004
-
Abstract
- Poster presentation. QC 20120124
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1234604841
- Document Type :
- Electronic Resource