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Lateral-field-excited thin-film Lamb wave resonator
- Publication Year :
- 2005
-
Abstract
- The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves.<br />SSF ICTEA
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1234558551
- Document Type :
- Electronic Resource
- Full Text :
- https://doi.org/10.1063.1.1900312