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Reliability investigation of stress-compensated metal-coated monocrystalline-silicon membranes for MEMS tuneable high-impedance surfaces
- Authors :
- Sterner, Mikael
Chicherin, Dmitry
Räisänen, Antti V.
Stemme, Göran
Oberhammer, Joachim
Sterner, Mikael
Chicherin, Dmitry
Räisänen, Antti V.
Stemme, Göran
Oberhammer, Joachim
- Publication Year :
- 2010
-
Abstract
- QC 20111123. Oral presentation by Mikael Sterner
Details
- Database :
- OAIster
- Notes :
- English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1234536082
- Document Type :
- Electronic Resource