Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

MLA

Kilic, Ufuk, et al. Precursor-Surface Interactions Revealed during Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films by in-Situ Spectroscopic Ellipsometry. 2020. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1234426581&authtype=sso&custid=ns315887.

APA

Kilic, U., Mock, A., Sekora, D., Gilbert, S., Valloppilly, S., Ianno, N., Langell, M., Schubert, E., & Schubert, M. (2020). Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry.

Chicago

Kilic, Ufuk, Alyssa Mock, Derek Sekora, Simeon Gilbert, Shah Valloppilly, Natale Ianno, Marjorie Langell, Eva Schubert, and Mathias Schubert. 2020. “Precursor-Surface Interactions Revealed during Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films by in-Situ Spectroscopic Ellipsometry.” http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsoai&AN=edsoai.on1234426581&authtype=sso&custid=ns315887.