Microfabricated silicon electric mechanisms

Authors :: Stephen D. Senturia.
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Mehregany, Mehran
Stephen D. Senturia.
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Mehregany, Mehran
Publication Year :: 2005
Abstract: Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.<br />Includes bibliographical references (leaves 151-156).<br />by Mehran Mehregany.<br />Ph.D.

Database :: OAIster
Notes :: 181 leaves, 11500595 bytes, 11500351 bytes, application/pdf, English
Publication Type :: Electronic Resource
Accession number :: edsoai.on1143338072
Document Type :: Electronic Resource

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