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Investigation of mechanisms and influencing processing factors on mobility enhancement in strained Si n-MOSFETs
- Publication Year :
- 2014
-
Abstract
- Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.<br />Includes bibliographical references (p. 92-95).<br />by Guangrui Xia.<br />S.M.
Details
- Database :
- OAIster
- Notes :
- 95 p., application/pdf, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.on1140763698
- Document Type :
- Electronic Resource