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Enhancing MEMS design using statistical process information

Authors :
Duane S. Boning and Donald E. Troxel.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Moyne, William P. (William Patrick)
Duane S. Boning and Donald E. Troxel.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Moyne, William P. (William Patrick)
Publication Year :
2014

Abstract

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.<br />Includes bibliographical references (p. 145-148).<br />by William Patrick Moyne.<br />Ph.D.

Details

Database :
OAIster
Notes :
148 p., application/pdf, English
Publication Type :
Electronic Resource
Accession number :
edsoai.on1139822556
Document Type :
Electronic Resource

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