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Preface: Atomic Layer Deposition Applications 7

Authors :
Elam, Jeffrey W.
De Gendt, Stefan
Londergan, Ana
Bent, Stacey F.
van der Straten, O.
Delabie, Annelies
Roozeboom, F.
Elam, Jeffrey W.
De Gendt, Stefan
Londergan, Ana
Bent, Stacey F.
van der Straten, O.
Delabie, Annelies
Roozeboom, F.
Source :
ECS Transactions vol.41 (2011) date: 2011-01-01 nr.2 p.III-IV [ISSN 1938-5862]
Publication Year :
2011

Details

Database :
OAIster
Journal :
ECS Transactions vol.41 (2011) date: 2011-01-01 nr.2 p.III-IV [ISSN 1938-5862]
Notes :
Elam, Jeffrey W.
Publication Type :
Electronic Resource
Accession number :
edsoai.on1048593839
Document Type :
Electronic Resource

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