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Formation and control of stoichiometric hafnium nitride thin films by direct sputtering of hafnium nitride target

Authors :
00225666
Gotoh, Y
Liao, MY
Tsuji, H
Ishikawa, J
00225666
Gotoh, Y
Liao, MY
Tsuji, H
Ishikawa, J
Publication Year :
2003

Details

Database :
OAIster
Notes :
English
Publication Type :
Electronic Resource
Accession number :
edsoai.ocn957789582
Document Type :
Electronic Resource

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