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Sealed wedge-shaped silicon power triode

Authors :
Zhang, Jinshu
Lo, T.C.
Zhang, Jinshu
Lo, T.C.
Publication Year :
1995

Abstract

Sealed wedge-shaped silicon power triode have been fabricated by CMOS compatible technology. The fabricated field emitter has higher thermal and mechanical stability due to the Eiffel Tower shape. The sealed structure eliminates the needs for external vacuum pumping and improves the reliability and lifetime of the device. Anode current were demonstrated at anode voltage less than 4 volts.

Details

Database :
OAIster
Notes :
English
Publication Type :
Electronic Resource
Accession number :
edsoai.ocn905102580
Document Type :
Electronic Resource