Microspheres manipulation system by patterned AlGaN/GaN 2DEG electrodes

A manipulation system utilizing the properties of two-dimensional electron gas (2DEG) at the interface of AlGaN/GaN and dielectrophoresis (DEP) was investigated in this study. At an applied frequency ranging from 100 kHz to 1 MHz and a potential of 20 vpeak to peak, the positive and negative DEP of the microspheres were reported for the first time by the Fluorine ion patterned and parylene covered 2DEG. In addition, by simply switching the applied frequency between 100 kHz and 500 kHz, the microspheres could come onto or get off from 2DEG region of AlGaN/GaN surface. Thus, a promising sensing scheme was proposed by combining the manipulation with sensing properties of 2DEG. This manipulation system based on 2DEG will bring much benefit to sensor applications. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.