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Polymeric hemispherical pL micro cups fabricated by inkjet printing
- Source :
- In: 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2013)
- Publication Year :
- 2013
-
Abstract
- The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameter with inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% of exceptions are also described and shown as a method for achieving almost complete SU-8 spheres.<br />info:eu-repo/semantics/published
Details
- Database :
- OAIster
- Journal :
- In: 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2013)
- Notes :
- 1 full-text file(s): application/pdf, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.ocn872081715
- Document Type :
- Electronic Resource