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Isotopically Enriched (28)Si Crystal for Electronics Applications
- Source :
- DTIC AND NTIS
- Publication Year :
- 1992
-
Abstract
- We have designed and fabricated the sample holder for thermal conductivity measurements of the Si (28) epitaxial films. We have designed and fabricated the mask set for making the test structures on the Si(28) epitaxial wafers. We have fabricated some test structures on regular Si epitaxial wafers, and preliminary experiments are underway to measure the thermal conductivity of these samples.
Details
- Database :
- OAIster
- Journal :
- DTIC AND NTIS
- Notes :
- text/html, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.ocn832018235
- Document Type :
- Electronic Resource