Research and Development of Subsurface Acoustic Wave Devices for Sensor Applications.

Surface skimming bulk waves (SSBW) in quartz were examined for sensor applications. Sensitivities to substrate strains, temperature, and fluid immersion were determined for AT and BT-cut quartz. The application of a strain sensitive SSBW device configuration as a fluid damped, cantilever beam accelerometer was investigated. This program has resulted in the discovery of an SSAW mode with properties that are extremely well suited to the development of acoustic wave sensors. Originator-supplied keywords include: Surface Skimming Bulk Waves (SSBW), SSBW sensors, and SSBW strain sensitivity.