HTS Josephson E-Beam Technology with Applications to RSFQ Concept Demonstrations in High-T (sub c) Superconductors.

We have successfully fabricated and tested the first All-High-Tc circuit of the Rapid Single Flux Quantum (RSFQ) logic family using a single-layer YBa2Cu3O(7-x) thin-film structure with 14 in-plane Josephson junctions formed by direct electron beam writing. The circuit includes two DC/SFQ converters, two Josephson transmission lines, a complete RS SFQ flip-flop, and an SFQ/DC converter (readout SQUID). Low-frequency testing has shown that the dc-current biased circuit operates correctly and reliably at T-30 K, a few degrees below the effective critical temperature of the junctions. We have also made and studied the first SQUIDs on silicon substrates using the same method to demonstrate the feasibility of integrating HTS with silicon based technology.