Integrated SAW-AO Optical Switch on Si

The developments in the integration of the SAW acousto-optic Bragg deflector of guided optical waves in the ZnO thin film on a Si substrate and Schottky diode photodetectors orl-the same Si substrate are reported. Thin film lens has been fabricated by making use of a gradual film thickness change, the refractive index dispersion of the fundamental mode on the film thickness, and the mode cut-off property of the higher order modes in the area of the concave shaped converging lens of the ZnO film. The guided optical waves SAW-Bragg deflected, mode selected and lens focused are detected by-the Schottky diode photo-detector Incorporated at the boundary between the ZnO film wave guide and the Si substrate. A couple of detectors are located one for deflected and the other for undeflected waves.
This article is from 'Proceedings of the International Symposium on Integrated Ferroelectrics (ISIF) (3rd) Held in Colorado Springs, Colorado on 3-5 April 1991,' AD-A253 000, p492-500.