Sputtered Thin Film Research

Amorphous films of neodymium ultraphosphate and neodymium lanthanum ultrophosphate have been deposited by r.f. sputtering. Optical waveguide structures were fabricated and scattering losses were measured to be less than one dB/cm. Fluorescence lifetime measurements of Nd sup (3 tau) are presented. Data on growth of single crystal films of gallium nitride and tungsten trioxide by reactive sputtering is given. Reduced scattering losses in optical waveguide structures of zinc oxide grown on sapphire have been effected by reduction of secondary electron bombardment of the substrate during film growth. Data is presented on the effect of magnetic field configuration on suppressing secondary electron bombardment and its effect on film uniformity.
Sponsored in part by DARPA. See also report dated Oct 1973, AD0769972.