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RESEARCH ON THE SPUTTERING OF MULTICOMPONENT MATERIALS BY ION BOMBARDMENT.

Authors :
MINNESOTA UNIV MINNEAPOLIS PHYSICAL ELECTRONICS LAB
Wehner,G. K.
MINNESOTA UNIV MINNEAPOLIS PHYSICAL ELECTRONICS LAB
Wehner,G. K.
Source :
DTIC AND NTIS
Publication Year :
1970

Abstract

Results are given of (1) a study of the cone formation which arises at the surface of a high sputtering yield target such as Cu when it is seeded during sputtering with another material such as Mo, and (2) the analysis of composition changes at the surface of multicomponent targets under ion bombardment and of sputter deposited films by means of in situ auger electron analysis. (Author)

Details

Database :
OAIster
Journal :
DTIC AND NTIS
Notes :
text/html, English
Publication Type :
Electronic Resource
Accession number :
edsoai.ocn831498307
Document Type :
Electronic Resource