Back to Search
Start Over
RESEARCH ON THE SPUTTERING OF MULTICOMPONENT MATERIALS BY ION BOMBARDMENT.
- Source :
- DTIC AND NTIS
- Publication Year :
- 1970
-
Abstract
- Results are given of (1) a study of the cone formation which arises at the surface of a high sputtering yield target such as Cu when it is seeded during sputtering with another material such as Mo, and (2) the analysis of composition changes at the surface of multicomponent targets under ion bombardment and of sputter deposited films by means of in situ auger electron analysis. (Author)
Details
- Database :
- OAIster
- Journal :
- DTIC AND NTIS
- Notes :
- text/html, English
- Publication Type :
- Electronic Resource
- Accession number :
- edsoai.ocn831498307
- Document Type :
- Electronic Resource