Two-dimensional nanometer scale calibration based on one-dimensional gratings

Authors :: Garnæs, J.
Nielsen, L.
Dirscherl, K.
Jørgensen, J.F.
Rasmussen, J.B.
Lindelof, P.E.
Sørensen, C.B.
Garnæs, J.
Nielsen, L.
Dirscherl, K.
Jørgensen, J.F.
Rasmussen, J.B.
Lindelof, P.E.
Sørensen, C.B.
Source :: Garnæs , J , Nielsen , L , Dirscherl , K , Jørgensen , J F , Rasmussen , J B , Lindelof , P E & Sørensen , C B 1998 , ' Two-dimensional nanometer scale calibration based on one-dimensional gratings ' , Appl.Phys.A , no. 66 , pp. 831 .
Publication Year :: 1998

Database :: OAIster
Journal :: Garnæs , J , Nielsen , L , Dirscherl , K , Jørgensen , J F , Rasmussen , J B , Lindelof , P E & Sørensen , C B 1998 , ' Two-dimensional nanometer scale calibration based on one-dimensional gratings ' , Appl.Phys.A , no. 66 , pp. 831 .
Notes :: English
Publication Type :: Electronic Resource
Accession number :: edsoai.ocn826406475
Document Type :: Electronic Resource

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