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Heavy ion induced soft breakdown of thin gate oxides

Authors :
Vogel, E. M
Miyahara, T
Wang, B
Johnston, A. H
Suehle, J. S
Conley, J. F
Publication Year :
2001
Publisher :
United States: NASA Center for Aerospace Information (CASI), 2001.

Abstract

Heavy ion induced soft and hard breakdown are investigated in thin gate oxides as a function of LET, fluence, and voltage applied during irradiation. It is found that post-irradiation oxide conduction is well described by the Sune quantum point contact model.

Details

Language :
English
Database :
NASA Technical Reports
Publication Type :
Report
Accession number :
edsnas.20210002176
Document Type :
Report