A Large Aperture Fabry-Perot Tunable Filter Based On Micro Opto Electromechanical Systems Technology

A research and development effort sponsored by the NASA Goddard Spaceflight Center (GSFC) is focused on applying Micro Opto Electromechanical Systems (MOEMS) technology to create a miniature Fabry-Perot tunable etalon for space and ground-based near infrared imaging spectrometer applications. Unlike previous devices developed for small-aperture telecommunications systems, the GSFC research is directed toward a novel 12 - 40 mm aperture for astrophysical studies, including emission line imaging of galaxies and nebulae, and multi-spectral redshift surveys in the 1.1 - 2.3 micron wavelength region. The MOEMS design features integrated electrostatic scanning of the 11-micron optical gap, and capacitance micrometry for closed loop control of parallelism within a 10-nm tolerance. The low thermal mass and inertia inherent in MOEMS devices allows for rapid cooling to the proposed 30 K operating temperature, and high frequency response. Achieving the proposed 6-nm aperture flatness (with an effective finesse of 50) represents the primary technical challenge in the current 12-mm prototype.