Development of large CCD arrays with enhanced UV performance

A development status evaluation is presented for proprietary UV-range CCDs for military and scientific applications requiring pixel sizes in the 18-micron range. The most recent developments in UV/X-ray responsive detectors have their bases in the backside illumination of multipinned phase (MPP) 1024 x 1024 CCD arrays, as well as in the initial exploration of open-pinned phase (OPP) techniques. The frontside performance of both MPP and OPP devices is noted to be excellent as well, and pinouts and mounting techniques have been defined which allow easy front-back operation comparisons. Novel backside processing techniques are being refined.