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A high frequency silicon pressure sensor
- Publication Year :
- 1980
- Publisher :
- United States: NASA Center for Aerospace Information (CASI), 1980.
-
Abstract
- Theoretical and design considerations as well as fabrication and experimental work involved in the development of high-frequency silicon pressure sensors with an ultra-small diaphragm are discussed. A sensor is presented with a rectangular diaphragm of 0.0127 cm x 0.0254 cm x 1.06 micron; the sensor has a natural frequency of 625 kHz and a sensitivity of 0.82 mv/v-psi. High-frequency results from shock tube testing and low-frequency (less than 50 kHz) comparison with microphones are given.
- Subjects :
- Instrumentation And Photography
Subjects
Details
- Language :
- English
- Database :
- NASA Technical Reports
- Publication Type :
- Report
- Accession number :
- edsnas.19810048442
- Document Type :
- Report