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Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy
- Publication Year :
- 2014
- Subjects :
- Metrology.
Microscopy.
Subjects
Details
- Language :
- English
- Database :
- Government Publishing Office Catalog
- Journal :
- Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.
- Publication Type :
- Book
- Accession number :
- edsgpr.001074015
- Document Type :
- Monograph