Room-temperature scanning Hall probe microscope (RT-SHPM) imaging of garnet films using new high-performance InSb sensors

High-performance InSb micro-Hall sensors were fabricated by optical lithography and incorporated in a room-temperature scanning Hall probe microscope for imaging of localized magnetic fluctuations in close proximity to the surfaces of crystalline uniaxial garnet films. The room-temperature noise figure of the InSb sensors was 6-10 mG/[square root of (Hz)], which is an order of magnitude better than GaAs-AlGaAs two-dimensional electron gas sensors used to date. Index Terms--Hall effect, scanning Hall probe microscopy.