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Manufacturing process of piezoelectric thin-film dual-stage actuator and its reliability for HDD
- Source :
- IEEE Transactions on Magnetics. Sept, 2002, Vol. 38 Issue 5, p2156, 3 p.
- Publication Year :
- 2002
-
Abstract
- A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives was proposed and developed. This dual-stage actuator device is characterized by the sputter-deposited thin-film PZT, featuring large displacement of 1.2 [micro]m and high-resonance frequency over 15 kHz. In this paper, reliability against temperature, humidity, and mechanical shock was investigated to ensure the practical application to the drive products. Index Terms--Dual-stage actuator, magnetic disk drive, microactuator, piezoelectric actuator, PZT.
- Subjects :
- Dielectric films -- Analysis
Thin films
Actuators -- Design and construction
Hard disks -- Design and construction
Piezoelectric devices -- Design and construction
Hard disk drive
Under 5GB hard disk drive
5GB - 9.99GB hard disk drive
10GB - 14.99GB hard disk drive
15GB - 19.99GB hard disk drive
20GB - 25GB hard disk drive
Over 25GB hard disk drive
Business
Electronics
Electronics and electrical industries
Subjects
Details
- ISSN :
- 00189464
- Volume :
- 38
- Issue :
- 5
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Magnetics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.94130486