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Synthesis and structures of zirconium amide-iodide complexes
- Source :
- Inorganic Chemistry. July 29, 2002, Vol. 41 Issue 15, p4063, 5 p.
- Publication Year :
- 2002
-
Abstract
- Research has been conducted on the zirconium amide-iodide complexes. The synthesis of these complexes has been carried out in investigating their ability to be used as chemical vapor deposition precursors to zirconium nitride films and the results are reported.
- Subjects :
- Chemistry, Inorganic -- Research
Amides -- Physiological aspects
Iodides -- Physiological aspects
Zirconium -- Physiological aspects
Coordination compounds -- Physiological aspects
Chemical vapor deposition -- Physiological aspects
Thin films -- Physiological aspects
Nitrides -- Physiological aspects
Chemistry
Subjects
Details
- ISSN :
- 00201669
- Volume :
- 41
- Issue :
- 15
- Database :
- Gale General OneFile
- Journal :
- Inorganic Chemistry
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.91179387