Back to Search
Start Over
Chemical vapor deposition of gallium nitride from the GaCl (sub)3 +NH (sub)3 system. Theoretical study of the structure and thermodynamics of potential intermediates formed in the gaseous phase
- Source :
- Inorganic Chemistry. June 17, 2002, Vol. 41 Issue 12, p3067, 9 p.
- Publication Year :
- 2002
-
Abstract
- Research has been conducted on the hydrogen chloride. The computational results of the hydrogen chloride elimination from Cl (sub)3 GaNH (sub)3 and intermediates' gas-phase polymerization are presented.
- Subjects :
- Chemistry, Inorganic -- Research
Gallium -- Physiological aspects
Nitrides -- Physiological aspects
Chlorides -- Physiological aspects
Nitrogen -- Physiological aspects
Hydrogen -- Physiological aspects
Thermodynamics -- Research
Gases -- Physiological aspects
Polymerization -- Physiological aspects
Chemistry
Subjects
Details
- ISSN :
- 00201669
- Volume :
- 41
- Issue :
- 12
- Database :
- Gale General OneFile
- Journal :
- Inorganic Chemistry
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.89148976