Plasma parameters of diffusion-controlled microwave discharges in surface-wave fields

Results from diagnostics of diffusion-controlled stationary gas discharges maintained in the field of propagating surface waves are presented in this study. The set of the plasma parameters obtained includes: 1) the plasma density [bar]n, averaged over the discharge cross section, and its axial profile [bar]n(z); 2) the electron-neutral elastic collision frequency v; 3) the parameter [mu] which describes the radial profile of the plasma density; 4) the parameter [THETA], the power absorbed on average by an electron, and its axial variation [THETA] (z); 5) the electron temperature [T.sub.e] (z); and 6) the gas temperature [T.sub.g]. The mechanisms of electron heating and discharge self-consistency are discussed. Index Terms--Gas-discharge plasma diagnostics, radio-frequency diagnostics techniques, surface-wave-sustained discharges.