Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions

An important design issue of electrostatic torsion actuator is the relative locations of the actuating electrodes, where the bias voltage is applied. These geometrical design parameters affect both the Pull-In angle as well as the Pull-In voltage. In this paper, a new approximated analytical solution for the Pull-In equation of an electrostatic torsion actuator with rectangular plates is derived. The analytical expression is shown to be within 0.1% of the one degree of freedom (1DOF) lumped-element model numerical simulations. Moreover, the analytical expressions are compared with the full coupled-domain finite-elements/boundary-elements (FEM/BEM) simulations provided by MEMCAD4.8 Co-solve tool, showing excellent agreement. The approach presented here provides better physical insight, more rapid simulations and an improved design optimization tool for the actuator. [661] Index Terms--Actuator, design, electrostatic, pull-in, torsion.