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Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions
- Source :
- Journal of Microelectromechanical Systems. Feb, 2002, Vol. 11 Issue 1, p20, 7 p.
- Publication Year :
- 2002
-
Abstract
- An important design issue of electrostatic torsion actuator is the relative locations of the actuating electrodes, where the bias voltage is applied. These geometrical design parameters affect both the Pull-In angle as well as the Pull-In voltage. In this paper, a new approximated analytical solution for the Pull-In equation of an electrostatic torsion actuator with rectangular plates is derived. The analytical expression is shown to be within 0.1% of the one degree of freedom (1DOF) lumped-element model numerical simulations. Moreover, the analytical expressions are compared with the full coupled-domain finite-elements/boundary-elements (FEM/BEM) simulations provided by MEMCAD4.8 Co-solve tool, showing excellent agreement. The approach presented here provides better physical insight, more rapid simulations and an improved design optimization tool for the actuator. [661] Index Terms--Actuator, design, electrostatic, pull-in, torsion.
Details
- ISSN :
- 10577157
- Volume :
- 11
- Issue :
- 1
- Database :
- Gale General OneFile
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.83554095