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Catalytic amplification of the soft lithographic patterning of Si. nonelectrochemical orthogonal fabrication of photoluminescent porous Si Pixel Arrays
- Source :
- Journal of the American Chemical Society. Sept 12, 2001, Vol. 123 Issue 36, p8709, 9 p.
- Publication Year :
- 2001
-
Abstract
- Research describing the process leading to the amplification of lithographic patterning of silicon using catalysis is presented. Particular attention is given to the fabrication of orthogonal arrays of photoluminescent porous silicon pixel.
- Subjects :
- Photoluminescence -- Usage
Silicon -- Research
Chemistry
Subjects
Details
- ISSN :
- 00027863
- Volume :
- 123
- Issue :
- 36
- Database :
- Gale General OneFile
- Journal :
- Journal of the American Chemical Society
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.80113667