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Catalytic amplification of the soft lithographic patterning of Si. nonelectrochemical orthogonal fabrication of photoluminescent porous Si Pixel Arrays

Authors :
Yoshiko Harada
xiuling Li
Bohn, Paul W.
Nuzzo, Ralph G.
Source :
Journal of the American Chemical Society. Sept 12, 2001, Vol. 123 Issue 36, p8709, 9 p.
Publication Year :
2001

Abstract

Research describing the process leading to the amplification of lithographic patterning of silicon using catalysis is presented. Particular attention is given to the fabrication of orthogonal arrays of photoluminescent porous silicon pixel.

Details

ISSN :
00027863
Volume :
123
Issue :
36
Database :
Gale General OneFile
Journal :
Journal of the American Chemical Society
Publication Type :
Academic Journal
Accession number :
edsgcl.80113667