Back to Search
Start Over
Properties of NbTiN thin films prepared by reactive DC magnetron sputtering
- Source :
- IEEE Transactions on Applied Superconductivity. March, 2001, Vol. 11 Issue 1, p3828, 4 p.
- Publication Year :
- 2001
-
Abstract
- Nb1-xTixN thin films were prepared using reactive dc magnetron sputtering, and superconducting properties were found to be strongly linked to sputtering conditions.
Details
- ISSN :
- 10518223
- Volume :
- 11
- Issue :
- 1
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Applied Superconductivity
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.78631478